193nm Glan-Taylor Polarizer utilizes α-BBO birefringent crystals separated by an air gap to eliminate absorption issues from adhesive materials in the deep UV range. Single-layer MgF₂ anti-reflective coatings ensure high transmission at 193nm while maintaining excellent extinction performance. Engineered with a high laser damage threshold, it is ideal for high-precision polarization control in applications such as ArF excimer laser lithography and deep-UV laser processing.
Features: Air-Spaced Close to Brewster's Angle Cutting High Polarization Purity Deep ultraviolet transmission |
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商品番号 :
GTP-193製品の原産地 :
FuZhouSpecifications:
Material: | Deep ultraviolet materials |
Wavelength Range: | 193.368nm |
Extinction Ratio: | <1x10-4 |
Parallelism: | <1 arc Min |
Surface Quality: | 20/10 |
Beam Deviation: | < 3 arc minutes |
Wavefornt Distortion: | 1/4@632.8nm |
Damage Threshold: | >200 MW/cm2 |
193nm Glan Taylor Polarizer
Part No. | Wavelength Rang(nm) | Extinction Ratio | Angular Field(°) | C.A. fa(mm) | O.D. fd(mm) | L ±0.1(mm) |
GTP4006 | 193.368 | <5x10-6 | >6.0 | 5.0 | 25.4 | 13.0 |
GTP4008 | 6.5 | 25.4 | 14.0 | |||
GTP4010 | 8.0 | 25.4 | 16.0 | |||
GTP4013 | 10.0 | 25.4 | 20.0 | |||
GTP4015 | 12.0 | 30.0 | 23.0 | |||
GTP4020 | 18.0 | 38.1 | 28.0 | |||
GTP4025 | 22.0 | 50.8 | 33.0 |
The technical advantages of 193nm Glan-Taylor Polarizer:
The 193nm Glan-Taylor Polarizer features deep-UV-compatible materials, which have ultra-low absorption and excellent transmittance at 193nm, precisely maintaining polarization direction. Its air-gap design avoids absorption interference from adhesives in deep UV, paired with dedicated anti-reflective coatings to reduce reflection loss, suiting high-power deep-UV laser scenarios.